Microelectronic Sensors for Various Applications
New combined (integral) type sensors will allow simultaneous measurement of several parameters. For example, combined sensors may comprise humidity sensors consisting of temperature sensors, and thin-layer heater with increased operating range and increased sensitivity.
In summary, the Enerize team has developed a new class of sensors based on new thin-film semi-conducting materials including cerium, tungsten, dysprosium oxides and two- composition oxide systems. This new class of sensors will have the following applications:
Radiation resistant highly-sensitive temperature sensors (atomic power, thermal power)
Heat flows and heat loss sensors utilizing portable electronic transducer tubes
Microelectronic sensors for oxygen and carbon oxides content for control and selection of optimal firing conditions (e.g. thermoelectric power stations, boiler-houses, etc.)
Microelectronic sensors for determination of hydrogen concentration
Microelectronic sensors for determination and control of ion concentration (calcium, fluorine, etc.) for determination of water hardness at thermoelectric power stations.
Enerize is developing various microelectronic sensors based on new multiple-composition thin‑layer materials for determining parameters such as humidity, temperature, ultra-violet radiation, bio analysis, etc. These sensors will have increased reliability, sensitivity, and can be faster-acting and more precise than current micro-sensors.